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Holger Beh

Holger Beh

Holger Beh

University of Freiburg - IMTEK
Department of Nanotechnology
Room 103-01-097
Georges-Koehler-Allee 103
79110 Freiburg
 
Phone: +49 (0)761 203-7101

Research project

Transparent conductive oxides (TCOs) play an important role as transparent top contacts in energy harvesting via solar cells and for light emitting diodes. Since indium tin oxide (ITO) is rather expensive and rare, cheaper and more abundant alternatives are needed. Usually, zinc oxide with added aluminum (AZO) is used for most TCO applications. The deposition via sputtering, however, includes problems concerning impact energy, layer uniformity and vacuum requirements. These problems can be overcome by the use of pure zinc oxide (ZnO) deposited by atomic layer deposition (ALD). The reason for ALD ZnO being conductive without added aluminum is not clear yet. Possible candidates for the conductivity mechanism are e.g. oxygen defects, hydrogen interstitials and zinc defects.

In our project, ALD-ZnO layers are characterized by various methods to eventually obtain a complete and consistent image of the conductivity mechanism in ALD ZnO in order to optimize the fabrication parameters for maximum conductivity as well as possible improved long-term stability.

Curriculum Vitae

Practical and Scientific Experience

2014 - Today
University of Freiburg

Department of Nanotechnology

PhD-Student

2012 - 2014

Fraunhofer IAF

Research Assistant

2011 - 2012

Max Planck Institute MPI-IE

Research Assistant

Studies

2011 - 2013

University of Freiburg

Faculty of Physics, M.Sc.

2008 - 2011

University of Freiburg

Faculty of Physics, B.Sc.

 

Publications

Paper

  • Laube J, Nübling D, Beh H, Gutsch S, Hiller D, Zacharias M
    *Resistivity of atomic layer deposition grown ZnO: The influence of deposition temperature and post-annealing* 2016 /Thin Solid Films/, Band: 603, Seite: 377,
    DOI: 10.1016/j.tsf.2016.02.060
  • Beh H, Hiller D, Laube J, Gutsch S, Zacharias M
    *Deposition temperature dependence and long-term stability of the conductivity of undoped ZnO grown by atomic layer deposition*
    2017 /J Vac Sci Technol A/, Band: 35, Nummer: 1, Seite: 01B127,
    DOI: 10.1116/1.4972466
  • Beh H, Hiller D, Bruns M, Welle A, Becker H, Berghoff B, Suergers C, Merz R, Zacharias M
    *Quasi-metallic behavior of ZnO grown by atomic layer deposition: The role of hydrogen*
    2017 /J Appl Phys/, Band: 122, Nummer: 4, ACCEPTED

 

Conference contributions:

  • H. Beh, D. Hiller, M. Bruns, A. Welle, H.-W. Becker, B. Berghoff, C.
    Sürgers, M. Zacharias: Quasi-metallic ZnO grown by atomic layer
    deposition (ALD): understanding the origin of conductivity.
    /Presentation, /E-MRS Fall Meeting 2017, Warsaw, 18-21 September 2017
    (ACCEPTED)
  • H. Beh, D. Hiller, M. Bruns, A. Welle, H.-W. Becker, M. Zacharias:
    Maximizing the conductivity of ALD ZnO. /Presentation,/ //E-MRS Fall
    Meeting 2017, Warsaw, 18-21 September 2017 (ACCEPTED)
  • H. Beh, D. Hiller, B. Berghoff, M. Zacharias: ZnO grown by atomic layer
    deposition: A good TCO for future applications?. /Poster/, E-MRS Fall
    Meeting 2017, Warsaw, 18-21 September 2017 (ACCEPTED)

 

by Florian Opitz last modified Jul 10, 2017 09:41 AM
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